Posted on 15 Sep 2022
The Ministry of Trade, Industry and Energy announced on Sept. 12 that it would relax 11 safety regulations regarding the use of high-pressure gas in the semiconductor industry.
“Of the 11, seven related to semiconductor manufacturing equipment and storage facilities will be relaxed soon through expert reviews and specific measures regarding the other four will be prepared through discussions and on-site surveys,” it said.
The 11 include regulatory adjustment for facilitating the import of EUV lithography equipment. For example, the ministry is planning to improve super duplex steel-related regulations in that the steel is used in high-pressure gas piping of advanced EUV lithography equipment. At present, high-pressure gas-related domestic laws have no provisions as to super duplex steel and thus advanced EUV lithography equipment cannot be imported.
The ministry is planning to improve gas safety regulations so that a material such as super duplex steel can be used in high-pressure gas piping on condition that its safety is confirmed by the American Society of Mechanical Engineers or the like.
The ministry’s plan also includes protective wall material-related regulation adjustment. At present, each of the walls for protection from high-pressure gas explosion must be made of thick concrete, which has hindered plant expansion. However, protective walls made of various safety-proven materials, including steel sheets, are expected to be permitted.
Source:Business Korea
